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- TEAM SOLUTIONS, INC.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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Generators
Generating Signal From a File
The Software Signal generator allows to produce signals from binary and text files at the DAC output.
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Generators
Noise Generator
The noise type to be generated is to be selected from the context menu: right-click the section with the noise name and select the noise type you need.
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Plasma Emission Controller
RU-1000
The optical technology developed by HORIBA and the gas control technology offered by HORIBA STEC have been combined to make further advances in plasma control technology. The plasma emission controller RU-100 offers; faster deposition by controlling the transition region, optimized distribution in a large-area, high-capacity chamber, plasma stabilization in a long sputtering process (stable deposition), and mixture optimization of compounds for reactive sputtering.
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Generators
Vibration Shock
Software Vibration shock is used for testing specimen resistance to vibration impact. This software is a part of the software complex ZETLAB VIBRO, supplied together with vibration control systems ZET 017-U. The software enables generation of impacts with pre-set parameters and noise presence within a specified frequency range. The software is activated via ZETLAB control panel and VCS menu.
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Microwave Plasma Subsystems
AX2600 And AX2700
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
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Generators
GE is bringing generator technology and performance to the next level. We engineer and build our generators to meet the demanding specifications that keep you on the leading edge of efficient, reliable output. Our equipment installs quickly, integrates easily, operates reliably and delivers more power. With over 12,000 generators shipped since 1901, GE understands your challenges, and offers a complete range of configurations and cooling technologies to meet industry needs.
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Generators
Saw-Tooth Signal Generator
The Software Signal generator allows to produce triangular and saw-tooth (descending, ascending) signals at the DAC output.
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Function Generators
Waveform : Sine, Triangle, Square, Pulse, Sawtooth, Ramp 0.2Hz-150MHz EXT Frequency Counter(Option : 1:6 GHz or 2.7GHz) Self made insert ASIC Function : Total, RPM, Period, LPF, COUPL(AC/DC), ATT(X10) Fast,High-Resolution, 8Digits LED display Internal or External AM,FM Modulation Internal or External Burst and Linear Sweep Countrol from 1 : 1 to 100:1 TTL/CMOS Leveled Square Wave Output Maximum Attenuation of 20 dB cna be obtained Output impedance : 50 INPUT SENSITMTYKHz Range : 100mVms, MHz Range : 300mVms SWEEP WIDTH : Variable from 1:1 -100:1 RATE : 0.5Hz - 50Hz(20ms-2s) INTERNAL : Linear Bilt-in 5digits Green LED display
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Signal Generators
One of a class of electronic devices that generates electrical signals with set properties of amplitude, frequency, and wave shape.
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Pulse Generators
Dedicated analogue pulse generators and function generators with true pulse capability.
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Waveform Generators
UNI-T waveform generators adopt Direct Digital Synthesizer (DDS) technology to generate high frequency signals such as sine waves, square waves, harmonic waves, arbitrary waves, noise etc. Our signal generators also provide analog and digital modulation functions. All models have arbitrary waveform generator with editable software to generate complex waveform. UNI-T has a range of solutions from 5M to 600M to meet your performance needs, including UTG900E series mini generators for hobbyist and UTG9000T high-performance series. With industry leading pricing the UNI-T portfolio of waveform generators provides unparalleled customer value.
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Pattern Generators
PG314P Series
The MicroImage PG314 series of pattern generators are for applications to display custom designed patterns on screen. The PG314 units will overlay the pattern or patterns on top of the video signal provided to the input of the device. While the PG311 can be factory programmed with only one unique pattern, the PG314 can hold up to four patterns and switch between them.
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Pattern Generators
A Pattern Generator outputs digital data and is used to stimulate circuits. The data can be from user files, previously captured data or from the data creation wizard (editor) in the software. All of our Pattern Generators (digital word generators) are also Logic Analyzers and are controlled with easy-to-use Windows software. Some or all of the outputs are bi-directional and can be used to capture data.
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Generators
Sine Signal Generator
The Software Sine generator allows to produce sine and constant voltage signals at the DAC output.
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Surge Generators
K&S Engineering and Scientific Ltd
The instrument is fully enclosed in a robust all steel enclosure mounted on castors and fitted with carrying handles. The control panel forms the top of the case, it is finished in high gloss light blue stoving with cutter engraved labelling, and is protected by a detachable lid. The EHT outlet is of a recessed type designed to prevent accidental contact with high voltages. Surge repetition is electronically controlled from 0 to 10 seconds, a single surge or a train of pulses can be selected by a panel mounted switch. Automatic discharge of the instrument is achieved by a gravity operated switch which is released on switching 'OFF' the instrument or on disconnecting the supply.
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Signal Generators
2, 4 and 8 Channel Arbitrary Waveform Generator and Pulse Pattern Generator solutions are ideal choice in automated test benches, for physics experiments, semiconductor tests, analog and digital debugging.
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Plasma Profiling TOFMS
PP-TOFMS
Plasma Profiling TOFMS addresses the needs of materials scientists across a wide range of application areas. PP-TOFMS provides fast elemental depth distribution of any inorganic material. The speed and ease of use of PP-TOFMS permit to reduce optimization time of growth processes as many research scientists strive to reduce the time from discovery to applications of new materials.The simultaneous full coverage of TOFMS available for each point of depth permits the detection of non suspected contamination. This is key for failure analysis and optimization of thin film processes that tend to no longer be based on ultra-high grade methods (i.e. ink jet printing…).
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Telecom Generators
Telecommunication networks are exposed to particularly natural disasters such as lightning and its effects. Therefore all connected telecommunications systems require reliable protection. Our subsequent Surge Simulators are specifically designed for EMC testing of telecommunications systems in accordance with ITU-T.
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Surge Generators
Hybrid
Surge pulses occur due to direct or indirect lightning strikes in a circuit or by switching transients caused by switching inductive loads or short circuits. This leads to currents or electromagnetic fields causing high voltage or current transients. Surge voltages and currents can reach several thousands of volts and thousands of amperes. Our following Surge generators simulate these disturbances for all the necessary level in accordance with IEC / EN 61000-4-5 and IEC / EN 60060.
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AC Reference Generators
SR23
Computer Conversions Corporation
The SR23 Series are miniature, low cost AC reference generators designed to supply 26 or 115 volt excitation (2-115VAC) to synchros or resolvers in military and industrial control applications. They accept +/-15V DC or +/-12V DC power inputs and provide up to 5VA of transformer isolated output power. These converters are packaged in PC card mounting modules 2.6”x3.1”x1”H.
